Nanometrics

Carrier Concentration

Carrier concentration measurements in layers can be challenging. Knowing a full device profile is sometimes desired as well as bulk carrier concentration. The ECV Pro offers unmatched precision, unique multi-layer concentration profiling with a depth resolution down to 1nm. Various illumination sources and etching algorithms allow the system etching through virtually any III-V material and give a precise and accurate concentration profile. Automated contacting & agent handling takes away the need for specialized operators. Automated analysis and data output allows the use in productive environments.

 

The HL5500 is the choice for bulk resistivity, mobility and carrier concentration. It slim and compact design, advanced software algorithms and available options made the HL5500 the industry standard over many years. Available options allow measurements of high resistive materials, automated temperature ramps and precise positioning. The software carries the know ease of use concept of other Nanometrics products.