Nanometrics

Epi Manufacturing

Epi Manufacturing

Epitaxial growth is one of the key processes in the industry and requires accurate thickness and carrier concentration profiling . With specialized applications, our FTIR system can rapidly monitor epitaxial grown layers, measure impurities in the material and substrate and deliver high speed measurements, not building a bottleneck in an automated production environment.

 

The ECVPro provides highly accurate carrier concentration profiles to check for the material and process stability.