Nanometrics
Stratus-Epi-Film-Thickness-System

Stratus

Epi Thickness Monitor

 

Stratus, an addition to the QS series, is an automated epitaxial film thickness measuring system featuring high speed wafer handling. It is designed to create a new level of integration of FTIR tools utilizing proven optical technology, modern robotic wafer handling with very high throughput and state of the art GEM/SECS, ethernet communications in a contamination-free clean environment.