9010T

[Integrated Metrology] Optical CD & Film Analysis System

The 9010T Series is ideal for optical critical dimension (OCD) measurements using polarized spectroscopic reflectometry. With spectral range of 210 - 780 nm and excellent UV transmission, the information necessary for advanced films and structures is provided. 9010T systems are available in SEMI standard BOLTS configuration, as well as a compact configuration for incorporation within the frame of the process equipment. Ideal applications include closed loop process control for critical etch and lithography processes.