The Trajectory T³ is an innovative integrated metrology module for monitoring and control of critical processes in semiconductor fabs worldwide. Nanometrics' Trajectory T³ is changing integrated metrology. Approved for integration by leading process tool manufactures, the Trajectory T³ changed the benchmark for speed, reliability, and cost. With robust large area optical collectors and simple yet powerful spectral detectors, cost is minimized at a MTBF >10,000 hours.
Throughput capability of >250 wph enables measurement of every process wafer even on the fastest process tools. Enabling process tools to measure thicknesses inside the tool and inside the wafer's patterned devices, the Trajectory T³ delivers advantages in speed, reliability, and cost.