Nanometrics
Imperia PL Imaging System

Imperia

Photoluminescence (PL) Imaging System

 

With its unique optical design technology, the Imperia detects and classifies yield-killing defects with the additional benefit of simultaneous state-of-the-art photoluminescence (PL) production monitoring. There are significant economic savings to be gained by more accurately predicting MOCVD reactor yield and PM schedules. Combining these two post-epitaxial metrology screening functions into a single high throughput system minimizes valuable fab space use and cassette handling time.

 

The Imperia definitively distinguishes yield-killing defects from nuisance defects by contrasting traditional darkfield images with the electrically active defect PL images – providing the PL process control benefits of wafer/platter uniformity and tighter binning yield.