Nanometrics
Stratus FTIR

Stratus

Epi Thickness Monitor

 

Stratus, an addition to the QS series, is an automated epitaxial film thickness measuring system featuring high speed wafer handling. It is designed to create a new level of integration of FTIR tools utilizing proven optical technology, modern robotic wafer handling with very high throughput and state of the art GEM/SECS, ethernet communications in a contamination-free clean environment.