Nanometrics

Atlas XP+ Upgrade Options

The Atlas XP+ upgrade is the fastest and most cost effective way to extend capability to support technology scaling and scribe line reduction. The upgrade will help you to reach the 32nm technology node for precision, repeatability, matching, throughput and serviceability. The table belows indicates certain benefits when considering system upgrades.

  Increase Precision Extend Life Increase Capacity New Apps Improve Service-ability
Atlas XP+ Upgrade Options
210nm to 193nm / 40u Box w/o Chiller
yes
yes
yes
yes
yes
210nm to 193nm / 40u Box w/ Chiller
yes
yes
yes
yes
yes
193nm to 193nm / 40u Box Only
yes
yes
yes
yes
yes
Atlas XP Upgrade Options
210nm to 193nm / 50u Box w/o Chiller
yes
yes
yes
yes
yes
210nm to 193nm / 50u Box w/ Chiller
yes
yes
yes
yes
yes
193nm to 193nm / 50u Box Only
yes
yes
yes
yes
yes

Key upgrade value considerations:

  • 50% increase in tool life: Up to 2 nodes and ≥2 years life extension
  • Extended node performance on installed based tools enabled by wavelength extension to 193nm
  • Scribe and box scaling enabled by small spot SE – Reduced scribe space for next generation targets
  • Couple Atlas XP+ upgrade with the NanoCD suite

 

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