Nanometrics

Vertex Upgrade Options

The Vertex upgrade eliminates obsolescence and ensures serviceability while enabling significantly higher data acquisition rates, increased throughput and extended tool life.

 

  Increase Precision Extend Life Increase Capacity New Apps Improved
Service-
ability
Vertex Upgrade Options
Turbo Vertex Automated
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Turbo Vertex Manual
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Key upgrade value considerations:

  • Eliminate related obsolescence to ensure future serviceability
  • Boost data acquisition rate from 30 spectra per second to 120 spectra per second
  • Increase throughput by up to 30%
  • Increase process monitoring in yield opportunity edge region
  • Extend tool life by up to 50% or more

 

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